Invention Grant
- Patent Title: Method for S/TEM sample analysis
- Patent Title (中): S / TEM样品分析方法
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Application No.: US12446387Application Date: 2007-10-22
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Publication No.: US08455821B2Publication Date: 2013-06-04
- Inventor: Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
- Applicant: Jason Arjavac , Pei Zou , David James Tasker , Maximus Theodorus Otten , Gerhard Daniel
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg; Ki O
- International Application: PCT/US2007/082166 WO 20071022
- International Announcement: WO2008/049134 WO 20080424
- Main IPC: G01N1/06
- IPC: G01N1/06 ; G01N1/08 ; G01N23/04 ; H01J37/20

Abstract:
An improved method and apparatus for S/TEM sample preparation and analysis. Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (
Public/Granted literature
- US20110006207A1 METHOD FOR S/TEM SAMPLE ANALYSIS Public/Granted day:2011-01-13
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