Invention Grant
- Patent Title: Ion microscope
- Patent Title (中): 离子显微镜
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Application No.: US13381623Application Date: 2010-06-04
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Publication No.: US08455841B2Publication Date: 2013-06-04
- Inventor: Norihide Saho , Hiroyuki Tanaka , Noriaki Arai , Hiroyasu Shichi , Yoichi Ose
- Applicant: Norihide Saho , Hiroyuki Tanaka , Noriaki Arai , Hiroyasu Shichi , Yoichi Ose
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2009-154537 20090630
- International Application: PCT/JP2010/003730 WO 20100604
- International Announcement: WO2011/001600 WO 20110106
- Main IPC: H01J37/26
- IPC: H01J37/26

Abstract:
Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.
Public/Granted literature
- US20120097863A1 ION MICROSCOPE Public/Granted day:2012-04-26
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