Invention Grant
- Patent Title: Method for making structures with improved edge definition
- Patent Title (中): 具有改进边缘定义的结构的方法
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Application No.: US12746888Application Date: 2008-11-06
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Publication No.: US08455846B2Publication Date: 2013-06-04
- Inventor: Brian J. Gates , Robert T. Krasa , Przemyslaw P. Markowicz , Craig R. Sykora , Robert J. DeVoe , Dean Faklis
- Applicant: Brian J. Gates , Robert T. Krasa , Przemyslaw P. Markowicz , Craig R. Sykora , Robert J. DeVoe , Dean Faklis
- Applicant Address: US MN Saint Paul
- Assignee: 3M Innovative Properties Company
- Current Assignee: 3M Innovative Properties Company
- Current Assignee Address: US MN Saint Paul
- Agent Kristofor L. Storvick
- International Application: PCT/US2008/082588 WO 20081106
- International Announcement: WO2009/075970 WO 20090618
- Main IPC: H01L21/027
- IPC: H01L21/027
Abstract:
A method includes scanning a radiation beam with respect to a multi-photon curable photoreactive composition. The radiation beam includes a power sufficient to at least partially cure a volume of the multiphoton curable photoreactive composition. The method further includes modifying a characteristic of the radiation beam as the radiation beam is scanned.
Public/Granted literature
- US20100294954A1 METHOD FOR MAKING STRUCTURES WITH IMPROVED EDGE DEFINITION Public/Granted day:2010-11-25
Information query
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