Invention Grant
- Patent Title: Ion beam incident angle detection assembly and method
- Patent Title (中): 离子束入射角检测装置及方法
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Application No.: US13648775Application Date: 2012-10-10
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Publication No.: US08455848B2Publication Date: 2013-06-04
- Inventor: Thomas A. Pandolfi
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/317
- IPC: H01J37/317

Abstract:
In an ion implanter, a detector assembly is employed to monitor the ion beam current and incidence angle at the location of the work piece or wafer. The detector assembly includes a plurality of pairs of current sensors and a blocker panel. The blocker panel is coupled to the detector array to move together with the detector array. The blocker panel is also disposed a distance away from the sensors to allow certain of the beamlets that comprise the ion beam to reach the sensors. Each sensor in a pair of sensors measures the beam current incident thereon and the incident angle is calculated using these measurements. In this manner, beam current and incidence angle variations may be measured at the work piece site and be accommodated for, thereby avoiding undesirable beam current profiles.
Public/Granted literature
- US20130035897A1 ION BEAM INCIDENT ANGLE DETECTION ASSEMBLY AND METHOD Public/Granted day:2013-02-07
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