Invention Grant
US08455858B2 Semiconductor structure for reducing band-to-band tunneling (BTBT) leakage
有权
半导体结构用于减少带内隧穿(BTBT)泄漏
- Patent Title: Semiconductor structure for reducing band-to-band tunneling (BTBT) leakage
- Patent Title (中): 半导体结构用于减少带内隧穿(BTBT)泄漏
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Application No.: US13120122Application Date: 2010-11-08
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Publication No.: US08455858B2Publication Date: 2013-06-04
- Inventor: Jing Wang , Jun Xu , Lei Guo
- Applicant: Jing Wang , Jun Xu , Lei Guo
- Applicant Address: CN
- Assignee: Tsinghua University
- Current Assignee: Tsinghua University
- Current Assignee Address: CN
- Agency: Greenberg Traurig, LLP
- Priority: CN201010151192 20100416
- International Application: PCT/CN2010/078526 WO 20101108
- International Announcement: WO2011/127727 WO 20111020
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L31/0328 ; H01L31/0336 ; H01L31/072 ; H01L31/109

Abstract:
A semiconductor structure is provided. The semiconductor structure may include a substrate (100); a buffer layer or an insulation layer (200) formed on the substrate; a first strained wide bandgap semiconductor material layer (400) formed on the buffer layer or the insulation layer; a strained narrow bandgap semiconductor material layer (500) formed on the first strained wide bandgap semiconductor material layer; a second strained wide bandgap semiconductor material layer (700) formed on the strained narrow bandgap semiconductor material layer; a gate stack (300) formed on the second strained wide bandgap semiconductor material layer; and a source and a drain (600) formed in the first strained wide bandgap semiconductor material layer, the strained narrow bandgap semiconductor material layer and the second strained wide bandgap semiconductor material layer respectively.
Public/Granted literature
- US20110260173A1 SEMICONDUCTOR STRUCTURE Public/Granted day:2011-10-27
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