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US08455858B2 Semiconductor structure for reducing band-to-band tunneling (BTBT) leakage 有权
半导体结构用于减少带内隧穿(BTBT)泄漏

Semiconductor structure for reducing band-to-band tunneling (BTBT) leakage
Abstract:
A semiconductor structure is provided. The semiconductor structure may include a substrate (100); a buffer layer or an insulation layer (200) formed on the substrate; a first strained wide bandgap semiconductor material layer (400) formed on the buffer layer or the insulation layer; a strained narrow bandgap semiconductor material layer (500) formed on the first strained wide bandgap semiconductor material layer; a second strained wide bandgap semiconductor material layer (700) formed on the strained narrow bandgap semiconductor material layer; a gate stack (300) formed on the second strained wide bandgap semiconductor material layer; and a source and a drain (600) formed in the first strained wide bandgap semiconductor material layer, the strained narrow bandgap semiconductor material layer and the second strained wide bandgap semiconductor material layer respectively.
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