Invention Grant
- Patent Title: Nonvolatile semiconductor memory device and method for manufacturing the same
- Patent Title (中): 非易失性半导体存储器件及其制造方法
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Application No.: US12980856Application Date: 2010-12-29
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Publication No.: US08455941B2Publication Date: 2013-06-04
- Inventor: Takamitsu Ishihara , Hideaki Aochi
- Applicant: Takamitsu Ishihara , Hideaki Aochi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-141924 20100622
- Main IPC: H01L29/792
- IPC: H01L29/792

Abstract:
A nonvolatile semiconductor memory device includes a stacked body including electrode films stacked in a first direction; a conductive pillar piercing the stacked body in the first direction; an inner insulating film, a semiconductor pillar, an intermediate insulating film, a memory layer, and an outer insulating film provided between the conductive pillar and the electrode films. The inner insulating film is provided around a side face of the conductive pillar. The semiconductor pillar is provided around a side face of the inner insulating film. The intermediate insulating film is provided around a side face of the semiconductor pillar. The memory layer is provided around a side face of the intermediate insulating film. The outer insulating film is provided around a side face of the memory layer.
Public/Granted literature
- US20110309432A1 NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2011-12-22
Information query
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