Invention Grant
- Patent Title: Semiconductor device having vertical-type channel
- Patent Title (中): 具有垂直型通道的半导体器件
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Application No.: US13085283Application Date: 2011-04-12
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Publication No.: US08455942B2Publication Date: 2013-06-04
- Inventor: Jung-Woo Park
- Applicant: Jung-Woo Park
- Applicant Address: KR Icheon-si
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Icheon-si
- Agency: Kilpatrick Townsend & Stockton LLP
- Priority: KR10-2005-0132568 20051228
- Main IPC: H01L29/772
- IPC: H01L29/772

Abstract:
A semiconductor device includes an active region including a surface region and a first recess formed below the surface region, the active region extending along a first direction; a device isolation structure provided on an edge of the active region; a gate line traversing over the surface region of the active region along a second direction orthogonal to the first direction; a second recess formed in the device isolation structure to receive a given portion of the gate line into the second recess; a first junction region formed in the active region beneath the first recess and on a first side of the gate line; and a second junction region formed on a second side of the gate line and above the first junction region. The first and second junction regions define a vertical-type channel that extends along lateral and vertical directions.
Public/Granted literature
- US20110198688A1 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE HAVING VERTICAL-TYPE CHANNEL Public/Granted day:2011-08-18
Information query
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