Invention Grant
- Patent Title: Low frequency CMUT with vent holes
- Patent Title (中): 低频CMUT带通风孔
-
Application No.: US13309773Application Date: 2011-12-02
-
Publication No.: US08455963B1Publication Date: 2013-06-04
- Inventor: Steven Adler , Peter Johnson , Ira Oaktree Wygant
- Applicant: Steven Adler , Peter Johnson , Ira Oaktree Wygant
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Eugene C. Conser; Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L29/84
- IPC: H01L29/84 ; H02K41/02 ; A61B8/00
Abstract:
A capacitive micromachined ultrasonic transducer (CMUT), which has a conductive structure that can vibrate over a cavity, has a number of vent holes that are formed in the bottom surface of the cavity. The vent holes eliminate the deflection of the CMUT membrane due to atmospheric pressure which, in turn, allows the CMUT to receive and transmit low frequency ultrasonic waves.
Public/Granted literature
- US20130140654A1 Low Frequency CMUT with Vent Holes Public/Granted day:2013-06-06
Information query
IPC分类:
