Invention Grant
- Patent Title: Semiconductor test system and relay driving test method therefor
- Patent Title (中): 半导体测试系统及其继电器驱动测试方法
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Application No.: US13125664Application Date: 2009-10-16
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Publication No.: US08456171B2Publication Date: 2013-06-04
- Inventor: Shingo Matsuno , Kenji Emura , Hiroki Kitamura
- Applicant: Shingo Matsuno , Kenji Emura , Hiroki Kitamura
- Applicant Address: JP Hyogo
- Assignee: Japan Electronic Materials Corp.
- Current Assignee: Japan Electronic Materials Corp.
- Current Assignee Address: JP Hyogo
- Agency: Faegre Baker Daniels LLP
- Priority: JP2008-273679 20081024
- International Application: PCT/JP2009/067883 WO 20091016
- International Announcement: WO2010/047275 WO 20100429
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
It is aimed to provide a probe card test system and a relay driving test method for probe cards which can automatically and continuously perform tests without bringing needle tips into contact with a number of relays mounted on a probe card and by using a device. In a probe card test system for testing a probe card using a tester, the probe card includes a substrate having a first probe and a first relay connected to the first probe, a relay controller for the first relay and a first measurement channel for connecting the first relay and the first probe to the tester are further provided on the substrate. The tester includes a DC power supply, a control board for controlling the relay controller for the first relay, and a first measurement circuit connected to the first measurement channel, the DC power supply and a voltmeter. The first measurement circuit includes a first resistor having a predetermined time constant and a first changeover switch to be connected to the first measurement channel. The DC power supply and the first resistor are connected to the first changeover switch, and the first measurement channel is switchingly connected to the DC power supply or the first resistor by the first changeover switch.
Public/Granted literature
- US20110193562A1 SEMICONDUCTOR TEST SYSTEM AND RELAY DRIVING TEST METHOD THEREFOR Public/Granted day:2011-08-11
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