Invention Grant
- Patent Title: Bulk acoustic wave devices and method for spurious mode suppression
- Patent Title (中): 体声波器件及杂散模式抑制方法
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Application No.: US12617036Application Date: 2009-11-12
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Publication No.: US08456257B1Publication Date: 2013-06-04
- Inventor: Gernot G. Fattinger
- Applicant: Gernot G. Fattinger
- Applicant Address: US OR Hillsboro
- Assignee: TriQuint Semiconductor, Inc.
- Current Assignee: TriQuint Semiconductor, Inc.
- Current Assignee Address: US OR Hillsboro
- Agency: Schwabe Williamson & Wyatt
- Main IPC: H03H9/15
- IPC: H03H9/15 ; H03H9/54

Abstract:
A bulk acoustic wave resonator desirably suppressing spurious modes includes a frame-like structure of mass loading contacting one electrode, wherein the frame-like structure is defined within inner and outer boundaries and wherein a central area extends through the resonator within an envelope of the inner boundary and a border region extends through the resonator within the inner and outer boundaries of the frame-like structure. A second electrode is positioned within the envelope and substantially missing from within the border region. A layer of piezoelectric material is embedded between the first and second electrodes. An active resonator area is substantially within the central area. The resonator structure is carried on a substrate and an acoustically reflective mirror having multiple and alternating layers of low and high acoustic impedance material.
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