Invention Grant
- Patent Title: Environmental system including vacuum scavenge for an immersion lithography apparatus
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Application No.: US12382661Application Date: 2009-03-20
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Publication No.: US08456610B2Publication Date: 2013-06-04
- Inventor: Andrew J. Hazelton , Michael Sogard
- Applicant: Andrew J. Hazelton , Michael Sogard
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/52

Abstract:
A liquid containment system is used for a liquid immersion lithography apparatus in which a substrate is exposed through liquid between an optical member of a projection system and the substrate. The liquid containment system includes a liquid containment member which confines the liquid, the liquid containment member including a removing inlet which removes the liquid from a gap between the liquid confinement member and the substrate. The liquid containment system also includes an actuator by which the liquid containment member is moved.
Public/Granted literature
- US20090180096A1 Environmental system including vacuum scavenge for an immersion lithography apparatus Public/Granted day:2009-07-16
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