Invention Grant
- Patent Title: Exposure apparatus and method of manufacturing device
- Patent Title (中): 曝光装置及其制造方法
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Application No.: US12791539Application Date: 2010-06-01
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Publication No.: US08456612B2Publication Date: 2013-06-04
- Inventor: Kyoichi Miyazaki , Kiyoshi Fukami
- Applicant: Kyoichi Miyazaki , Kiyoshi Fukami
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2009-132427 20090601
- Main IPC: G03B27/42
- IPC: G03B27/42 ; G03B27/70 ; G02B7/182 ; G02B5/10 ; G03F7/20

Abstract:
An exposure apparatus projects a pattern of an original onto a substrate by a projection optical system to expose the substrate, wherein the projection optical system includes a mirror assembly, and the mirror assembly includes a first mirror member which has a first reflecting surface and is configured to bend an optical axis of the projection optical system, a second mirror member which has a second reflecting surface and is configured to bend the optical axis, a supporting mechanism configured to support the first mirror member and the second mirror member, and the supporting mechanism is positioned to position the first mirror member and the second mirror member while a positional relationship between the first mirror member and the second mirror member is maintained.
Public/Granted literature
- US20100302517A1 EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE Public/Granted day:2010-12-02
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