Invention Grant
- Patent Title: Methods for real-time contamination, environmental, or physical monitoring of a photomask
- Patent Title (中): 光掩模的实时污染，环境或物理监测的方法
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Application No.: US12182668Application Date: 2008-07-30
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Publication No.: US08456625B2Publication Date: 2013-06-04
- Inventor: Brent A. Anderson , Robert K. Leidy , Jed H. Rankin
- Applicant: Brent A. Anderson , Robert K. Leidy , Jed H. Rankin
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Wood, Herron & Evans LLP
- Agent Anthony J. Canale
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G06F17/50
Abstract:
Methods for real-time contamination, environmental, or physical monitoring of a photomask. An attribute of a photomask is monitored using a sensor of an electronics package attached to the photomask. The methods further include generating one or more sensor signals relating to the monitored attribute with the sensor and transmitting the one or more sensor signals from the electronics package to a control system.
Public/Granted literature
- US20100029021A1 METHODS FOR REAL-TIME CONTAMINATION, ENVIRONMENTAL, OR PHYSICAL MONITORING OF A PHOTOMASK Public/Granted day:2010-02-04
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