Invention Grant
- Patent Title: Optical system
- Patent Title (中): 光学系统
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Application No.: US13303296Application Date: 2011-11-23
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Publication No.: US08456641B1Publication Date: 2013-06-04
- Inventor: Vladimir Levinski , Noah Bareket , Michael E. Adel
- Applicant: Vladimir Levinski , Noah Bareket , Michael E. Adel
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Luedeka Neely Group, P.C.
- Agent Rick Barnes
- Main IPC: G01N21/55
- IPC: G01N21/55

Abstract:
An optical system including a light source, optics for directing illumination, thereby producing reflected light, optics for receiving the reflected light, a splitter disposed at a pupil plane for receiving the reflected light and splitting it into a first and second portion, first imaging optics for receiving the first portion and directing it to a first sensor to produce a first image portion, the first sensor delivering the first image portion to a processor, second imaging optics for receiving the second portion and directing it to a second sensor to produce a second image portion, the second sensor delivering the second image portion to the processor, and the processor for combining the first image portion and the second image portion into a single image of the sample.
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