Invention Grant
- Patent Title: Laser gauge interferometer
- Patent Title (中): 激光计干涉仪
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Application No.: US12851192Application Date: 2010-08-05
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Publication No.: US08456642B2Publication Date: 2013-06-04
- Inventor: Keita Sugiura
- Applicant: Keita Sugiura
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2009-192259 20090821
- Main IPC: G01B11/02
- IPC: G01B11/02

Abstract:
There is provided a laser gauge interferometer with high measurement precision, which uses laser beam interference, includes: a measurement interferometer which generates a measurement output corresponding to a displacement of a moving member; and a correction interferometer which generates a measurement output corresponding to a change in refractive index of air at a constant reference interval. An arithmetic processing device computes a measurement target displacement amount for which the influence of the change in refractive index of air is corrected. A correction laser beam from the correction interferometer passes through the measurement interferometer and thus travels on the same optical path as an optical path of a correction laser beam from the measurement interferometer to become interference light corresponding to the change in refractive index of air through which a measurement laser beam passes, and then enters the arithmetic processing device.
Public/Granted literature
- US20110043819A1 LASER GAUGE INTERFEROMETER Public/Granted day:2011-02-24
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