Invention Grant
- Patent Title: Measurement of changes in surfaces of objects
- Patent Title (中): 测量物体表面的变化
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Application No.: US12874570Application Date: 2010-09-02
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Publication No.: US08456644B2Publication Date: 2013-06-04
- Inventor: Christopher J. Evans , John Filhaber , Vivek G. Badami , Jan Liesener
- Applicant: Christopher J. Evans , John Filhaber , Vivek G. Badami , Jan Liesener
- Applicant Address: US CT Middlefield
- Assignee: Zygo Corporation
- Current Assignee: Zygo Corporation
- Current Assignee Address: US CT Middlefield
- Agency: Fish & Richardson P.C.
- Main IPC: G01B11/02
- IPC: G01B11/02
Abstract:
Deformations of a surface of a test object can be measured by attaching mirrors to a surface of a test object, each mirror having a reflective surface with a dimension and a radius of curvature smaller than those of the surface of the test object. Light is directed towards the mirrors and a reference surface, and interference patterns are generated using light reflected from the mirrors and the reference surface. Changes in the surface of the test object are determined based on the interference patterns.
Public/Granted literature
- US20110051147A1 Measurement of Changes in Surfaces of Objects Public/Granted day:2011-03-03
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