Invention Grant
- Patent Title: Focal position detecting method
- Patent Title (中): 焦点位置检测方法
-
Application No.: US12703894Application Date: 2010-02-11
-
Publication No.: US08456651B2Publication Date: 2013-06-04
- Inventor: Shun-Sheng Ke , Meng-Che Tsai , Yang-Cheng Lin , Pin-Hao Hu , Yu-Hsiu Chang
- Applicant: Shun-Sheng Ke , Meng-Che Tsai , Yang-Cheng Lin , Pin-Hao Hu , Yu-Hsiu Chang
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Priority: TW98142025A 20091209
- Main IPC: G01J1/00
- IPC: G01J1/00 ; G01J1/20

Abstract:
A focal position detecting apparatus, for detecting a focusing condition and a tilting condition of an object, includes a planar beam generating module, an optical system, an optical sensor and a cylindrical lens. The planar beam generating module generates a planar light beam along a first path. The optical system is disposed on the first path, wherein the planar light beam, reflected by the object, passes through the optical system along a second path. The optical sensor is disposed on the second path. The cylindrical lens is disposed on the second path between the optical system and the optical sensor and an axis of the cylindrical lens is perpendicular to the second path. The planar light beam passes through the optical system and the cylindrical lens along the second path, before it is incident on the optical sensor to form a linear light spot for determining defocusing degree.
Public/Granted literature
- US20110134416A1 FOCAL POSITION DETECTING APPARATUS AND METHOD Public/Granted day:2011-06-09
Information query