Invention Grant
US08456770B2 Method of switching from immersion objective lens to dry objective lens 有权
从浸没式物镜切换到干式物镜的方法

Method of switching from immersion objective lens to dry objective lens
Abstract:
A microscope apparatus capable of removing liquid from an observation field of view of a dry objective lens, when an immersion objective lens is switched to the dry objective lens, is provided. The microscope apparatus includes a specimen XY stage on which a specimen is placed, a dry objective lens and an immersion objective lens that collect light from the specimen, a movable revolver that selectively disposes one of these objective lenses at a position facing the specimen, and a control unit that controls the specimen XY stage and movable revolver such that the relative positions in the XY direction are changed until the immersion objective lens is disposed at a non-observation region of the dry objective lens, prior to switching of these objective lenses.
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