Invention Grant
US08456958B2 Capacitive micro-machined ultrasonic transducer for element transducer apertures
有权
用于元件传感器孔径的电容式微加工超声波换能器
- Patent Title: Capacitive micro-machined ultrasonic transducer for element transducer apertures
- Patent Title (中): 用于元件传感器孔径的电容式微加工超声波换能器
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Application No.: US11357079Application Date: 2006-02-21
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Publication No.: US08456958B2Publication Date: 2013-06-04
- Inventor: Nicolas Felix , Aimé Flesch , Remi Dufait , An Nguyen-Dinh
- Applicant: Nicolas Felix , Aimé Flesch , Remi Dufait , An Nguyen-Dinh
- Applicant Address: FR Tours
- Assignee: Vermon S.A.
- Current Assignee: Vermon S.A.
- Current Assignee Address: FR Tours
- Agency: Stites & Harbison PLLC
- Agent Jeffrey A. Haeberlin
- Main IPC: H04R19/00
- IPC: H04R19/00

Abstract:
A capacitive micro-machined ultrasonic transducer (CMUT) array includes an improved elementary aperture for imaging operations. The transducer can be of a linear, curved linear, annular, matrix or even single surface configuration. The elementary apertures thereof are formed by a specific arrangement of capacitive micromachined membranes (CMM) so as to exhibit ideal acoustical and electrical behavior when operated with imaging systems. The CMM arrangements can be either conventional where the element transducers of the array are uniformly shaped by predefined CMMs in a manner such as to exhibit acoustic behavior similar to a piezoelectric transducer, or can be more sophisticated, wherein each element transducer is formed by a specific combination of different CMMs (i.e., of a different size and/or shape) so as to provide the transducer with built-in acoustic apodization that can be implemented in the azimuth and/or elevation dimension of the device.
Public/Granted literature
- US20070193354A1 Capacitive micro-machined ultrasonic transducer for element transducer apertures Public/Granted day:2007-08-23
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