Invention Grant
- Patent Title: Semiconductor laser device and method of manufacturing the same
- Patent Title (中): 半导体激光器件及其制造方法
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Application No.: US12873821Application Date: 2010-09-01
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Publication No.: US08457167B2Publication Date: 2013-06-04
- Inventor: Maki Sugai , Shinji Saito , Rei Hashimoto , Yasushi Hattori , Jongil Hwang , Masaki Tohyama , Shinya Nunoue
- Applicant: Maki Sugai , Shinji Saito , Rei Hashimoto , Yasushi Hattori , Jongil Hwang , Masaki Tohyama , Shinya Nunoue
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2010-050178 20100308
- Main IPC: H01S5/00
- IPC: H01S5/00

Abstract:
Embodiments describe a semiconductor laser device driven at low voltage and which is excellent for cleavage and a method of manufacturing the device. In one embodiment, the semiconductor laser device includes a GaN substrate; a semiconductor layer formed on the GaN substrate; a ridge formed in the semiconductor layer; a recess formed in the bottom surface of the GaN substrate. The recess has a depth less than the thickness of the GaN substrate. The device also has a notch deeper than the recess formed on a side surface of the GaN substrate and separated from the recess. In the semiconductor laser device, the total thickness of the GaN substrate and the semiconductor layer is 100 μm or more, and the distance between the top surface of the ridge and the bottom surface of the recess is 5 μm or more and 50 μm or less.
Public/Granted literature
- US20110216798A1 SEMICONDUCTOR LASER DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-09-08
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