Invention Grant
- Patent Title: Micro/nano devices fabricated from Cu-Hf thin films
- Patent Title (中): 由Cu-Hf薄膜制成的微/纳米器件
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Application No.: US13072343Application Date: 2011-03-25
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Publication No.: US08458811B2Publication Date: 2013-06-04
- Inventor: Erik J. Luber , Colin Ophus , David Mitlin , Brian Olsen , Christopher Harrower , Velimir Radmilović
- Applicant: Erik J. Luber , Colin Ophus , David Mitlin , Brian Olsen , Christopher Harrower , Velimir Radmilović
- Applicant Address: CA Edmonton, Alberta US CA Oakland
- Assignee: The Governors of the University of Alberta,The Regents of the University of California
- Current Assignee: The Governors of the University of Alberta,The Regents of the University of California
- Current Assignee Address: CA Edmonton, Alberta US CA Oakland
- Agency: Bennett Jones LLP
- Main IPC: G01Q60/38
- IPC: G01Q60/38
Abstract:
An all-metal microdevice or nanodevice such as an atomic force microscope probe is manufactured from a copper-hafnium alloy thin film having an x-ray amorphous microstructure.
Public/Granted literature
- US20120011624A1 MICRO/NANO DEVICES FABRICATED FROM CU-HF THIN FILMS Public/Granted day:2012-01-12
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