Invention Grant
- Patent Title: Microelectromechanical gyroscope with continuous self-test function
- Patent Title (中): 具有连续自检功能的微电子陀螺仪
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Application No.: US12973636Application Date: 2010-12-20
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Publication No.: US08459093B2Publication Date: 2013-06-11
- Inventor: Andrea Donadel , Luciano Prandi , Carlo Caminada
- Applicant: Andrea Donadel , Luciano Prandi , Carlo Caminada
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Priority: ITTO2009A1019 20091221
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A microelectromechanical gyroscope includes a body and a sensing mass, which is movable with a degree of freedom in response to rotations of the body about an axis. A self-test actuator is capacitively coupled to the sensing mass for supplying a self-test signal. The capacitive coupling causes, in response to the self-test signal, electrostatic forces that are able to move the sensing mass in accordance with the degree of freedom at an actuation frequency. A sensing device detects transduction signals indicating displacements of the sensing mass in accordance with the degree of freedom. The sensing device is configured for discriminating, in the transduction signals, spectral components that are correlated to the actuation frequency and indicate the movement of the sensing mass as a result of the self-test signal.
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