Invention Grant
- Patent Title: MEMS accelerometer with enhanced structural strength
- Patent Title (中): 具有增强结构强度的MEMS加速度计
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Application No.: US12927282Application Date: 2010-11-10
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Publication No.: US08459115B2Publication Date: 2013-06-11
- Inventor: Chuan-Wei Wang
- Applicant: Chuan-Wei Wang
- Applicant Address: TW Hsin-Chu
- Assignee: Pixart Imaging Incorporation, R.O.C.
- Current Assignee: Pixart Imaging Incorporation, R.O.C.
- Current Assignee Address: TW Hsin-Chu
- Agency: Tung & Associates
- Priority: TW99127394A 20100817
- Main IPC: G01P15/125
- IPC: G01P15/125

Abstract:
The present invention discloses a MEMS (Micro-Electro-Mechanical System, MEMS) accelerator with enhanced structural strength. The MEMS accelerator is located on a substrate, and it includes: multiple springs, wherein each spring includes: an anchor, fixed on the substrate; an extensible part, which has a fixed end fixed on the anchor, and a free end floating above the substrate; a proof mass, connected to the free ends of the springs; and multiple in-plane sense electrodes, wherein the extensible part is folded back and forth to form a substantially polygon shape as a whole, in which the fixed end is located within the middle one third length of one side of the substantially polygon shape, and the free end is located within the middle one third length of an opposite side of the substantially polygon shape.
Public/Granted literature
- US20120042729A1 MEMS accelerometer with enhanced structural strength Public/Granted day:2012-02-23
Information query
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