Invention Grant
US08459526B2 Method and apparatus for fabricating vertical deposition mask 有权
用于制造垂直沉积掩模的方法和装置

Method and apparatus for fabricating vertical deposition mask
Abstract:
A method and apparatus for fabricating a vertical deposition mask capable of welding a mask sheet and a mask frame for preventing a large area mask from drooping due to the weight of the mask. The apparatus includes a tensioning device for tensioning a mask sheet and a welder for attaching a mask frame to a circumference of the mask sheet. The tensioning device includes clamps for supporting the mask sheet and tensioners coupled to the clamps for applying tensile force to the clamps and to evenly fix in place the mask sheet by the clamps.
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