Invention Grant
- Patent Title: Process for fabricating patterned magnetic recording device
- Patent Title (中): 制造图案化磁记录装置的方法
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Application No.: US12768616Application Date: 2010-04-27
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Publication No.: US08460565B2Publication Date: 2013-06-11
- Inventor: Kim Y Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S Kuo , Dieter K Weller
- Applicant: Kim Y Lee , Hong Ying Wang , Nobuo Kurataka , Christopher Formato , David S Kuo , Dieter K Weller
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Agency: Ladas & Parry LLP
- Main IPC: B44C1/22
- IPC: B44C1/22

Abstract:
A method of fabricating a patterned magnetic recording medium, comprises steps of: (a) providing a layer stack including an uppermost non-magnetic interlayer; (b) forming a resist layer on the interlayer; (c) forming a first pattern comprising a first group of recesses extending through the resist layer and exposing a first group of spaced apart surface portions of the interlayer; (d) filling the first group of recesses with a layer of a hard mask material; (e) selectively removing the resist layer to form a second pattern comprising a second group of recesses extending through the hard mask layer and exposing a second group of spaced apart surface portions of the interlayer; and (f) filling the second group of recesses with a layer of a magnetically hard material forming a magnetic recording layer.
Public/Granted literature
- US20100221581A1 PROCESS FOR FABRICATING PATTERNED MAGNETIC RECORDING MEDIA Public/Granted day:2010-09-02
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