Invention Grant
- Patent Title: Thin film transistor and method for fabricating thin film transistor
- Patent Title (中): 薄膜晶体管及制造薄膜晶体管的方法
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Application No.: US13181995Application Date: 2011-07-13
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Publication No.: US08460966B2Publication Date: 2013-06-11
- Inventor: Sung Hwan Choi , Min Koo Han
- Applicant: Sung Hwan Choi , Min Koo Han
- Applicant Address: KR Seoul
- Assignee: Snu R&DB Foundation
- Current Assignee: Snu R&DB Foundation
- Current Assignee Address: KR Seoul
- Priority: KR10-2010-0072133 20100726
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L29/24

Abstract:
A thin film transistor, which has a first passivation layer and a second passivation layer to maintain high reliability while preventing hydrogen from being induced to a semiconductor layer, and a method for fabricating the thin film transistor are provided. The method includes providing a substrate including an insulation substrate, forming a gate electrode on the substrate, forming a gate insulation layer on the substrate and the gate electrode, forming a semiconductor layer on the gate insulation layer, forming source/drain electrodes on the semiconductor layer to expose a portion of a top portion of the semiconductor layer, forming a first passivation layer to cover exposed top portions of the gate insulation layer, the semiconductor layer and the source/drain electrodes, and forming a second passivation layer on the first passivation layer, wherein the forming of the second passivation layer comprises performing deposition at a higher temperature than the forming of the first passivation layer.
Public/Granted literature
- US20120018721A1 THIN FILM TRANSISTOR AND METHOD FOR FABRICATING THIN FILM TRANSISTOR Public/Granted day:2012-01-26
Information query
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