Invention Grant
- Patent Title: Method of making ultrahigh density vertical NAND memory device
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Application No.: US13693337Application Date: 2012-12-04
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Publication No.: US08461000B2Publication Date: 2013-06-11
- Inventor: Johann Alsmeier , George Samachisa
- Applicant: SanDisk Technologies Inc.
- Applicant Address: US TX Plano
- Assignee: SanDisk Technologies Inc.
- Current Assignee: SanDisk Technologies Inc.
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Monolithic, three dimensional NAND strings include a semiconductor channel, at least one end portion of the semiconductor channel extending substantially perpendicular to a major surface of a substrate, a plurality of control gate electrodes having a strip shape extending substantially parallel to the major surface of the substrate, the blocking dielectric comprising a plurality of blocking dielectric segments, a plurality of discrete charge storage segments, and a tunnel dielectric located between each one of the plurality of the discrete charge storage segments and the semiconductor channel.
Public/Granted literature
- US20130095646A1 ULTRAHIGH DENSITY VERTICAL NAND MEMORY DEVICE AND METHOD OF MAKING THEREOF Public/Granted day:2013-04-18
Information query
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