Invention Grant
US08461460B2 Microelectronic interconnect element with decreased conductor spacing 有权
具有减小导体间距的微电子互连元件

Microelectronic interconnect element with decreased conductor spacing
Abstract:
A microelectronic interconnect element can include a plurality of first metal lines and a plurality of second metal lines interleaved with the first metal lines. Each of the first and second metal lines has a surface extending within the same reference plane. The first metal lines have surfaces above the reference plane and remote therefrom and the second metal lines have surfaces below the reference plane and remote therefrom. A dielectric layer can separate a metal line of the first metal lines from an adjacent metal line of the second metal lines.
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