Invention Grant
US08461470B2 Method of measuring degradation condition of output mirror in laser oscillator and laser machining apparatus 失效
测量激光振荡器和激光加工设备中输出镜的退化条件的方法

Method of measuring degradation condition of output mirror in laser oscillator and laser machining apparatus
Abstract:
In a laser machining apparatus that performs machining by a laser beam (4) emitted from a laser oscillator (1), the laser machining apparatus herein provided includes an aperture (5) placed in a light path of the laser beam (4) emitted from the laser oscillator (1) so as to block a perimeter portion of the laser beam (4) and to transmit a middle portion thereof, and a beam-power measurement sensor (6) for measuring beam power of a laser beam (20) transmitted through the aperture (5), whereby it utilizes that beam power of the laser beam transmitted through the aperture (5) significantly changes (the more degraded, the more the beam power rises) due to a degradation condition of an output mirror (2) when the output mirror in the laser oscillator (1) becomes in high thermal loading condition due to the laser beam with high beam power, so that the degradation condition of the output mirror (2) is determined.
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