Invention Grant
- Patent Title: Adaptive processing constraints for memory repair
- Patent Title (中): 内存修复的自适应处理约束
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Application No.: US12646402Application Date: 2009-12-23
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Publication No.: US08461479B2Publication Date: 2013-06-11
- Inventor: Daniel J. Watson , Muir R. Cohen
- Applicant: Daniel J. Watson , Muir R. Cohen
- Applicant Address: US OR Portland
- Assignee: Electro Scientific Industries, Inc.
- Current Assignee: Electro Scientific Industries, Inc.
- Current Assignee Address: US OR Portland
- Agency: Young Basile
- Main IPC: B23K26/00
- IPC: B23K26/00

Abstract:
An apparatus and method for processing a plurality of semiconductor parts in a laser-based system adjusts a default recipe to account for work to be performed on at least one part of the plurality of parts. The work to be performed on a part is analyzed using the default recipe and a part-specific recipe including a modified parameter of the default recipe. The default or part-specific recipe is selected based on a desired processing result, and the selected recipe replaces the default recipe to perform the work using the laser-based system.
Public/Granted literature
- US20110147348A1 ADAPTIVE PROCESSING CONSTRAINTS FOR MEMORY REPAIR Public/Granted day:2011-06-23
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