Invention Grant
US08461541B2 Radiation detector, method of manufacturing a radiation detector and use of the detector for measuring radiation 有权
辐射探测器,辐射探测器的制造方法和辐射探测器的使用

Radiation detector, method of manufacturing a radiation detector and use of the detector for measuring radiation
Abstract:
A radiation detector is disclosed. The detector has an entrance opening etched through a low-resistivity volume of silicon, a sensitive volume of high-resistivity silicon for converting the radiation particles into detectable charges, and a passivation layer between the low and high-resistivity silicon layers. The detector also has electrodes built in the form of vertical channels for collecting the charges generated in the sensitive volume, and read-out electronics for generating signals based on the collected charges.
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