Invention Grant
- Patent Title: Radiation detector, method of manufacturing a radiation detector and use of the detector for measuring radiation
- Patent Title (中): 辐射探测器,辐射探测器的制造方法和辐射探测器的使用
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Application No.: US12794627Application Date: 2010-06-04
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Publication No.: US08461541B2Publication Date: 2013-06-11
- Inventor: Francisco Garcia , Risto Orava , Manuel Lozano , Giulio Pellegrini
- Applicant: Francisco Garcia , Risto Orava , Manuel Lozano , Giulio Pellegrini
- Applicant Address: FI
- Assignee: FinPhys Oy
- Current Assignee: FinPhys Oy
- Current Assignee Address: FI
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: FI20070939 20071204
- Main IPC: G01T1/24
- IPC: G01T1/24 ; H01L31/115

Abstract:
A radiation detector is disclosed. The detector has an entrance opening etched through a low-resistivity volume of silicon, a sensitive volume of high-resistivity silicon for converting the radiation particles into detectable charges, and a passivation layer between the low and high-resistivity silicon layers. The detector also has electrodes built in the form of vertical channels for collecting the charges generated in the sensitive volume, and read-out electronics for generating signals based on the collected charges.
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