Invention Grant
US08461596B2 Semiconductor device including semiconductor film with outer end having tapered shape
有权
半导体器件包括具有锥形形状的具有外端的半导体膜
- Patent Title: Semiconductor device including semiconductor film with outer end having tapered shape
- Patent Title (中): 半导体器件包括具有锥形形状的具有外端的半导体膜
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Application No.: US13288300Application Date: 2011-11-03
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Publication No.: US08461596B2Publication Date: 2013-06-11
- Inventor: Hideomi Suzawa , Yoshihiro Kusuyama , Shunpei Yamazaki
- Applicant: Hideomi Suzawa , Yoshihiro Kusuyama , Shunpei Yamazaki
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2001-062677 20010306; JP2001-062690 20010306
- Main IPC: H01L27/14
- IPC: H01L27/14 ; H01L21/00
Abstract:
The present invention has an object to provide an active-matrix liquid crystal display device that realizes the improvement in productivity as well as in yield. In the present invention, a laminate film comprising the conductive film comprising metallic material and the second amorphous semiconductor film containing an impurity element of one conductivity type and the amorphous semiconductor film is selectively etched with the same etching gas to form a side edge of the first amorphous semiconductor film 1001 into a taper shape. Thereby, a coverage problem of a pixel electrode 1003 can be solved and an inverse stagger type TFT can be completed with three photomask.
Public/Granted literature
- US20120043544A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-02-23
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