Invention Grant
- Patent Title: Non-volatile semiconductor memory device
- Patent Title (中): 非易失性半导体存储器件
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Application No.: US13073493Application Date: 2011-03-28
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Publication No.: US08461638B2Publication Date: 2013-06-11
- Inventor: Masakuni Shimizu
- Applicant: Masakuni Shimizu
- Applicant Address: JP Kanagawa
- Assignee: Renesas Electronics Corporation
- Current Assignee: Renesas Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Young & Thompson
- Priority: JP2010-076198 20100329
- Main IPC: H01L29/76
- IPC: H01L29/76 ; G11C11/34

Abstract:
A non-volatile semiconductor memory device includes: a charge accumulation layer (CAL) on a substrate; a memory gate formed onto the substrate through the CAL; a first side gate formed through a first insulating film on a first side of the memory gate; a second side gate formed through a second insulating film on a second side opposite to the first side; a first impurity implantation region (IIR1) in the substrate adjacent the first side gate; a second impurity implantation region (IIR2) formed in the substrate on a side of the second side gate; and a channel region between IIR1 and IIR2. The channel region includes a first region corresponding to a boundary between the CAL and the substrate; a select side region between the first region and IIR1; and an assist side region between the first region and IIR2. The select side region is longer than the assist side region.
Public/Granted literature
- US20110233649A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2011-09-29
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