Invention Grant
US08461652B2 Semiconductor device having an n-channel MOS transistor, a p-channel MOS transistor and a contracting film
有权
具有n沟道MOS晶体管,p沟道MOS晶体管和收缩膜的半导体器件
- Patent Title: Semiconductor device having an n-channel MOS transistor, a p-channel MOS transistor and a contracting film
- Patent Title (中): 具有n沟道MOS晶体管,p沟道MOS晶体管和收缩膜的半导体器件
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Application No.: US12568059Application Date: 2009-09-28
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Publication No.: US08461652B2Publication Date: 2013-06-11
- Inventor: Ryo Tanabe
- Applicant: Ryo Tanabe
- Applicant Address: JP Yokohama
- Assignee: Fujitsu Semiconductor Limited
- Current Assignee: Fujitsu Semiconductor Limited
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Main IPC: H01L21/70
- IPC: H01L21/70

Abstract:
In a second direction, in a plan view, an n-channel MOS transistor and an expanding film are adjacent. Therefore, the n-channel MOS transistor receives a positive stress in the direction in which a channel length is extended from the expanding film. As a result, a positive tensile strain in an electron moving direction is generated in a channel of the n-channel MOS transistor. On the other hand, in the second direction, in a plan view, a p-channel MOS transistor and the expanding film are shifted from each other. Therefore, the p-channel MOS transistor receives a positive stress in the direction in which a channel length is narrowed from the expanding film. As a result, a positive compressive strain in a hole moving direction is generated in a channel of the p-channel MOS transistor. Thus, both on-currents of the n-channel MOS transistor and the p-channel MOS transistor can be improved.
Public/Granted literature
- US20100013025A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-01-21
Information query
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