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US08461652B2 Semiconductor device having an n-channel MOS transistor, a p-channel MOS transistor and a contracting film 有权
具有n沟道MOS晶体管,p沟道MOS晶体管和收缩膜的半导体器件

Semiconductor device having an n-channel MOS transistor, a p-channel MOS transistor and a contracting film
Abstract:
In a second direction, in a plan view, an n-channel MOS transistor and an expanding film are adjacent. Therefore, the n-channel MOS transistor receives a positive stress in the direction in which a channel length is extended from the expanding film. As a result, a positive tensile strain in an electron moving direction is generated in a channel of the n-channel MOS transistor. On the other hand, in the second direction, in a plan view, a p-channel MOS transistor and the expanding film are shifted from each other. Therefore, the p-channel MOS transistor receives a positive stress in the direction in which a channel length is narrowed from the expanding film. As a result, a positive compressive strain in a hole moving direction is generated in a channel of the p-channel MOS transistor. Thus, both on-currents of the n-channel MOS transistor and the p-channel MOS transistor can be improved.
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