Invention Grant
US08462411B2 Optical reflection element with drive and monitor elements separated by a separation groove
有权
具有驱动和监视元件的光学反射元件由分隔槽分隔开
- Patent Title: Optical reflection element with drive and monitor elements separated by a separation groove
- Patent Title (中): 具有驱动和监视元件的光学反射元件由分隔槽分隔开
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Application No.: US13130150Application Date: 2009-11-18
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Publication No.: US08462411B2Publication Date: 2013-06-11
- Inventor: Soichiro Hiraoka , Jirou Terada , Shinsuke Nakazono , Shigeo Furukawa
- Applicant: Soichiro Hiraoka , Jirou Terada , Shinsuke Nakazono , Kiyomi Furukawa
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: RatnerPrestia
- Priority: JP2008-296354 20081120
- International Application: PCT/JP2009/006190 WO 20091118
- International Announcement: WO2010/058565 WO 20100527
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B26/10 ; G02B26/12

Abstract:
An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.
Public/Granted literature
- US20110292479A1 OPTICAL REFLECTION ELEMENT Public/Granted day:2011-12-01
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