Invention Grant
US08462411B2 Optical reflection element with drive and monitor elements separated by a separation groove 有权
具有驱动和监视元件的光学反射元件由分隔槽分隔开

Optical reflection element with drive and monitor elements separated by a separation groove
Abstract:
An optical reflection element includes a mirror portion and an oscillator coupled to the mirror portion. The oscillator includes a base, an insulating layer, a drive element, and a monitor element. The insulating layer is formed on the base. The drive element and the monitor element are formed on the insulating layer, and are separated from each other by a separation groove. Each of the drive element and the monitor element includes a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in that order on the insulating layer. The monitor element has high detection accuracy, allowing the optical reflection element to perform self-excited driving with high accuracy.
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