A layout error detection method includes the following steps, reading a layout file, in which the layout file includes a plurality of elements and a plurality of coordinates, and each element is corresponding to one coordinate; reading a record table, in which the record table includes an identification column, a coordinate column, and a flag column; scanning the layout file to obtain an error detection result, in which the error detection result is corresponding to an identification data and a coordinate data; searching the identification column of the record table to judge whether the identification column has the same identifier according to the identification data, and when a judgment result is false, writing the identification data and the coordinate data of the error detection result, setting a flag value to logic 0, and marking the error detection result; and scanning the layout file repeatedly until all the elements are scanned.