Invention Grant
US08464186B2 Providing electron beam proximity effect correction by simulating write operations of polygonal shapes 有权
通过模拟多边形的写入操作提供电子束邻近效应校正

Providing electron beam proximity effect correction by simulating write operations of polygonal shapes
Abstract:
A method for writing a design to a material using an electron beam includes assigning a first dosage to a first polygonal shape. The first polygonal shape occupies a first virtual layer and includes a first set of pixels. The method also includes simulating a first write operation using the first polygonal shape to create the design, discerning an error in the simulated first write operation, and assigning a second dosage to a second polygonal shape to reduce the error. The second polygonal shape occupies a second virtual layer. The method further includes creating a data structure that includes the first and second polygonal shapes and saving the data structure to a non-transitory computer-readable medium.
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