Invention Grant
- Patent Title: Microelectromechanical filter
- Patent Title (中): 微机电滤波器
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Application No.: US12940054Application Date: 2010-11-05
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Publication No.: US08471651B2Publication Date: 2013-06-25
- Inventor: Tsun-Che Huang , Feng-Chia Hsu , Pin Chang , Chin-Hung Wang
- Applicant: Tsun-Che Huang , Feng-Chia Hsu , Pin Chang , Chin-Hung Wang
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institutute
- Current Assignee: Industrial Technology Research Institutute
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Priority: TW99131228A 20100915
- Main IPC: H03H9/46
- IPC: H03H9/46 ; H03H9/00

Abstract:
A microelectromechanical filter is provided. The microelectromechanical filter includes an input electrode, an output electrode, one or several piezoelectric resonators, one or several high quality factor resonators, and one or several coupling beams. The input electrode and the output electrode are disposed on the piezoelectric resonators. The high quality factor resonator is silicon or of piezoelectric materials, and there is no metal electrode on top of the resonator. The coupling beam is connected between the piezoelectric resonator and the high quality factor resonator. The coupling beam transmits an acoustic wave among the resonators, and controls a bandwidth of filter. The microelectromechanical filter with low impedance and high quality factor fits the demand for next-generation communication systems.
Public/Granted literature
- US20120062340A1 MICROELECTROMECHANICAL FILTER Public/Granted day:2012-03-15
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