Invention Grant
US08472648B2 Miniature MEMS condenser microphone package and fabrication method thereof
有权
微型MEMS电容麦克风封装及其制造方法
- Patent Title: Miniature MEMS condenser microphone package and fabrication method thereof
- Patent Title (中): 微型MEMS电容麦克风封装及其制造方法
-
Application No.: US12813730Application Date: 2010-06-11
-
Publication No.: US08472648B2Publication Date: 2013-06-25
- Inventor: Yunlong Wang , Yi-Wen Chen
- Applicant: Yunlong Wang , Yi-Wen Chen
- Applicant Address: US CA Sunnyvale
- Assignee: General MEMS Corporation
- Current Assignee: General MEMS Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
MEMS microphone packages and fabrication methods thereof are disclosed. A MEMS microphone package includes a casing with a conductive part disposed over a substrate, to enclose a cavity. A MEMS acoustic sensing element and an IC chip are disposed inside the cavity. An opening with an acoustic passage connects the cavity to an ambient space. A first ground pad is disposed on a backside of the substrate connecting to the conductive part of the casing through a via hole of the substrate. A second ground pad is disposed on the backside of the substrate connecting to the MEMS acoustic sensing element or the IC chip through an interconnection of the substrate, wherein the first ground pad and the second ground pad are isolated from each other.
Public/Granted literature
- US20100246877A1 Miniature MEMS Condenser Microphone Package and Fabrication Method Thereof Public/Granted day:2010-09-30
Information query