Invention Grant
US08475006B2 Dark field illuminator and a dark field illumination method 有权
暗场照明器和暗场照明方式

  • Patent Title: Dark field illuminator and a dark field illumination method
  • Patent Title (中): 暗场照明器和暗场照明方式
  • Application No.: US12375554
    Application Date: 2007-08-01
  • Publication No.: US08475006B2
    Publication Date: 2013-07-02
  • Inventor: Zehava Ben-Ezer
  • Applicant: Zehava Ben-Ezer
  • Applicant Address: IL Migdal Ha'emek
  • Assignee: Camtek Ltd.
  • Current Assignee: Camtek Ltd.
  • Current Assignee Address: IL Migdal Ha'emek
  • Agent Oren Reches
  • International Application: PCT/IL2007/000962 WO 20070801
  • International Announcement: WO2008/015677 WO 20080207
  • Main IPC: F21V7/00
  • IPC: F21V7/00
Dark field illuminator and a dark field illumination method
Abstract:
A dark field illuminator that includes: (i) a light source adapted to provide ring of light characterized by uniform intensity distribution; (ii) a collimating ring adapted to receive the ring of light and to direct collimated light beams towards an area of an inspected object such that different points within the area are illuminated by identical cones of light characterized by an incidence angle; and wherein the collimating ring and the light source are co-centric to an optical axis of the dark field illuminator.
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