Invention Grant
- Patent Title: Carrier head membrane
- Patent Title (中): 载体膜
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Application No.: US12631239Application Date: 2009-12-04
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Publication No.: US08475231B2Publication Date: 2013-07-02
- Inventor: Young J. Paik , Ashish Bhatnagar , Kadthala Ramaya Narendrnath
- Applicant: Young J. Paik , Ashish Bhatnagar , Kadthala Ramaya Narendrnath
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: B24B1/00
- IPC: B24B1/00 ; B24B5/00
Abstract:
A flexible membrane includes a horizontal central portion, a vertical portion coupled to the central portion, a thick rim portion coupled to the vertical portion, and an extension coupled to the thick rim portion. An outer surface of the horizontal central portion provides a mounting surface configured to receive a substrate. The thick rim portion has a thickness that is greater than a portion directly adjacent to the thick rim portion. The thick rim portion is between the extension and the vertical portion and a greatest dimension of the extension is less than the thickness of the thick rim portion.
Public/Granted literature
- US20100311311A1 Carrier Head Membrane Public/Granted day:2010-12-09
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