Invention Grant
US08475599B2 Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions
失效
使用稳定液体溶液的底物制备和制备稳定流体溶液的方法
- Patent Title: Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions
- Patent Title (中): 使用稳定液体溶液的底物制备和制备稳定流体溶液的方法
-
Application No.: US11641362Application Date: 2006-12-18
-
Publication No.: US08475599B2Publication Date: 2013-07-02
- Inventor: Erik M. Freer , John M. de Larios , Michael Ravkin , Mikhail Korolik , Katrina Mikhaylichenko , Fritz C. Redeker
- Applicant: Erik M. Freer , John M. de Larios , Michael Ravkin , Mikhail Korolik , Katrina Mikhaylichenko , Fritz C. Redeker
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Martine Penilla Group, LLP
- Main IPC: B08B7/00
- IPC: B08B7/00

Abstract:
A method for making a solution for use in preparing a surface of a substrate is provided. The method includes providing a continuous medium that adds a polymer material to the continuous medium. A fatty acid is adding to the continuous medium having the polymer material, and the polymer material defines a physical network that exerts forces in the solution that overcome buoyancy forces experienced by the fatty acid, thus preventing the fatty acids from moving within the solution until a yield stress of the polymer material is exceeded by an applied agitation. The applied agitation is from transporting the solution from a container to a preparation station that applies the solution to the surface of the substrate.
Public/Granted literature
- US20070155640A1 Substrate preparation using stabilized fluid solutions and methods for making stable fluid solutions Public/Granted day:2007-07-05
Information query