Invention Grant
US08475669B2 System, method and apparatus for master pattern generation, including servo patterns, for ultra-high density discrete track media using e-beam and self-assembly of block copolymer microdomains 失效
用于主模式生成的系统,方法和装置,包括伺服模式,用于使用电子束的超高密度离散轨道介质和嵌段共聚物微区的自组装

  • Patent Title: System, method and apparatus for master pattern generation, including servo patterns, for ultra-high density discrete track media using e-beam and self-assembly of block copolymer microdomains
  • Patent Title (中): 用于主模式生成的系统,方法和装置,包括伺服模式,用于使用电子束的超高密度离散轨道介质和嵌段共聚物微区的自组装
  • Application No.: US12345799
    Application Date: 2008-12-30
  • Publication No.: US08475669B2
    Publication Date: 2013-07-02
  • Inventor: Thomas Robert AlbrechtBruno MarchonRicardo Ruiz
  • Applicant: Thomas Robert AlbrechtBruno MarchonRicardo Ruiz
  • Applicant Address: NL Amsterdam
  • Assignee: HGST Netherlands B.V.
  • Current Assignee: HGST Netherlands B.V.
  • Current Assignee Address: NL Amsterdam
  • Main IPC: B44C1/22
  • IPC: B44C1/22
System, method and apparatus for master pattern generation, including servo patterns, for ultra-high density discrete track media using e-beam and self-assembly of block copolymer microdomains
Abstract:
A system, method, and apparatus for forming a high quality master pattern for patterned media, including features to support servo patterns, is disclosed. Block copolymer self-assembly is used to facilitate the formation of a track pattern with narrower tracks. E-beam lithography forms a chemical contrast pattern of concentric rings, where the spacing of the rings is equal to an integral multiple of the target track pitch. The rings include regions within each servo sector header where the rings are offset radially by a fraction of a track pitch. Self-assembly is performed to form a new ring pattern at the target track pitch on top of the chemical contrast pattern, including the radial offsets in the servo sector headers. When this pattern is transferred to disks via nanoimprinting and etching, it creates tracks separated by nonmagnetic grooves, with the grooves and tracks including the radial offset regions.
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