Invention Grant
- Patent Title: Patterning of thin film layers
- Patent Title (中): 薄膜层的图案化
-
Application No.: US12626536Application Date: 2009-11-25
-
Publication No.: US08475872B2Publication Date: 2013-07-02
- Inventor: Sunggu Kang , Lili Huang , Steven Porter Hotelling , John Z. Zhong
- Applicant: Sunggu Kang , Lili Huang , Steven Porter Hotelling , John Z. Zhong
- Applicant Address: US CA Cupertino
- Assignee: Apple Inc.
- Current Assignee: Apple Inc.
- Current Assignee Address: US CA Cupertino
- Agency: Morrison & Foerster LLP
- Main IPC: B05D1/32
- IPC: B05D1/32

Abstract:
Simplified patterning of layers of a thin film is disclosed. In some embodiments, the patterning can include patterning a first conductive layer using a patterned dielectric layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. In other embodiments, the patterning can include patterning a first conductive layer using a removable photosensitive layer as a mask, patterning a black mask layer using a removable photo mask, and patterning a second conductive layer using a patterned passivation layer as another mask. In still other embodiments, the patterning can include patterning a first conductive layer using a patterned black mask layer as a mask and patterning a second conductive layer using a patterned passivation layer as another mask. An exemplary device utilizing the thin film so patterned can include a touch sensor panel.
Public/Granted literature
- US20110043383A1 PATTERNING OF THIN FILM LAYERS Public/Granted day:2011-02-24
Information query