Invention Grant
US08475941B2 Hard film, plastic working die, plastic working method, and target for hard film 有权
硬膜,塑料加工模具,塑料加工方法和硬膜靶材

Hard film, plastic working die, plastic working method, and target for hard film
Abstract:
There is provided a hard film excellent in wear resistance. The hard film in accordance with the present invention includes (TiaCrbAlcLd)(BxCyNz) in terms of composition, in which the L is at least one of Si and Y, and the a, b, c, d, x, y, and z each denote the atomic ratio, and satisfy: 0.1≦a
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