Invention Grant
US08475942B2 Hard-coating-coated member, tool, and target 有权
硬涂层构件,工具和目标

Hard-coating-coated member, tool, and target
Abstract:
A member covered with a hard coating having good wear resistance, a tool using the member, and a target for forming the hard coating are provided. A hard-coating-coated member has a hard coating on a substrate, in which the hard coating has a composition of (TiaCrbAlcSidYeRf)(CyNz), the R being at least one element selected from Ho, Sm, Dy and La, and when the subscripts a, b, c, d, e, f, y and z denote atomic ratios respectively, 0.05≦a≦0.3, 0.05≦b≦0.3, 0.4≦c≦0.65, 0≦d≦0.05, 0≦e≦0.05, 0.005≦f≦0.05, a+b+c+d+e+f=1, 0≦y≦0.3, 0.7≦z≦1, and y+z=1 are satisfied.
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