Invention Grant
US08476137B1 Methods of FinFET height control 有权
FinFET高度控制方法

Methods of FinFET height control
Abstract:
Disclosed herein are methods for better variable height control of FinFET patterned fins. In one example, the method includes forming a layer on a substrate, patterning that layer to create trenches, and forming a common stack material in the trenches. Next, a pFET masking material is formed over a portion of the structure, and an nFET channel material is formed in the unmasked trenches. The pFET masking material is removed and an nFET masking material is formed over the portion of the structure that includes the nFET channel material, and a pFET channel material is formed in the unmasked trenches. Next, the unmasked patterned material is made flush with the pFET channel material, thereby creating a difference in height with the masked pattern material. Finally, the nFET masking material is removed and the patterned layer is recessed to expose pFET and nFET channel material fin structures of differing heights.
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