Invention Grant
- Patent Title: Methods of FinFET height control
- Patent Title (中): FinFET高度控制方法
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Application No.: US13370722Application Date: 2012-02-10
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Publication No.: US08476137B1Publication Date: 2013-07-02
- Inventor: Nicholas LiCausi , Jeremy Wahl
- Applicant: Nicholas LiCausi , Jeremy Wahl
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Williams, Morgan & Amerson, P.C.
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
Disclosed herein are methods for better variable height control of FinFET patterned fins. In one example, the method includes forming a layer on a substrate, patterning that layer to create trenches, and forming a common stack material in the trenches. Next, a pFET masking material is formed over a portion of the structure, and an nFET channel material is formed in the unmasked trenches. The pFET masking material is removed and an nFET masking material is formed over the portion of the structure that includes the nFET channel material, and a pFET channel material is formed in the unmasked trenches. Next, the unmasked patterned material is made flush with the pFET channel material, thereby creating a difference in height with the masked pattern material. Finally, the nFET masking material is removed and the patterned layer is recessed to expose pFET and nFET channel material fin structures of differing heights.
Information query
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