Invention Grant
US08476473B2 Compound, method for preparing the compound and resist composition containing the compound
有权
化合物,制备化合物的方法和含有该化合物的抗蚀剂组合物
- Patent Title: Compound, method for preparing the compound and resist composition containing the compound
- Patent Title (中): 化合物,制备化合物的方法和含有该化合物的抗蚀剂组合物
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Application No.: US12552085Application Date: 2009-09-01
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Publication No.: US08476473B2Publication Date: 2013-07-02
- Inventor: Ichiki Takemoto , Nobuo Ando , Mitsuhiro Hata
- Applicant: Ichiki Takemoto , Nobuo Ando , Mitsuhiro Hata
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Chemical Company, Limited
- Current Assignee: Sumitomo Chemical Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2008-225072 20080902
- Main IPC: C07C69/63
- IPC: C07C69/63 ; C07C69/74

Abstract:
A compounds represented by the Formula (I) or the Formula (I′). wherein Z1 and Z2 independently represent a hydrogen atom, a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group, provided that at least one of Z1 and Z2 represent a C1 to C12 alkyl group or a C3 to C12 cyclic saturated hydrocarbon group; rings Y1 and Y2 independently represents an optionally substituted C3 to C20 alicyclic hydrocarbon group; Q1 to Q4 and Q′1 to Q′4 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group; and m and n independently represent an integer of 0 to 5.
Public/Granted literature
- US20100055609A1 COMPOUND, METHOD FOR PREPARING THE COMPOUND AND RESIST COMPOSITION CONTAINING THE COMPOUND Public/Granted day:2010-03-04
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