Invention Grant
- Patent Title: Thermal processing furnace
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Application No.: US12320433Application Date: 2009-01-26
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Publication No.: US08476560B2Publication Date: 2013-07-02
- Inventor: Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
- Applicant: Makoto Kobayashi , Kenichi Yamaga , Ken Nakao
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2008-021231 20080131
- Main IPC: F27B5/14
- IPC: F27B5/14 ; F27D11/02 ; H05B3/66

Abstract:
A thermal processing furnace comprises: a tubular heat insulation member 4 surrounding a processing vessel 3 for receiving and thermally processing an object to be processed w; a heating resistor 5 helically arranged on an inner circumferential surface of the heat insulation member 4; and a support member 13 disposed on the inner circumferential surface of the heat insulation member 4, the support member 13 supporting the heating resistor 5 such that the heating resistor 5 can be thermally expanded and thermally shrunk. The thermal processing furnace further comprises: a movement prevention member 15 disposed on the heating resistor 5 to be in contact with one side surface of the support member 13 so as to prevent a downward movement of the heating resistor 5.
Public/Granted literature
- US20090194521A1 Thermal processing furnace Public/Granted day:2009-08-06
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