Invention Grant
- Patent Title: Charged particle beam drawing apparatus and article manufacturing method
- Patent Title (中): 带电粒子束拉制装置及制品的制造方法
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Application No.: US13534044Application Date: 2012-06-27
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Publication No.: US08476607B2Publication Date: 2013-07-02
- Inventor: Tomonori Ishikawa , Nobushige Korenaga
- Applicant: Tomonori Ishikawa , Nobushige Korenaga
- Applicant Address: JP
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2011-151520 20110708
- Main IPC: H01J37/304
- IPC: H01J37/304

Abstract:
The drawing apparatus includes an optical system housing configured to emit a charged particle beam toward the substrate, a stage configured to hold the substrate and be moved at least in a direction perpendicular to an axis of the optical system housing, a detection device including a detector and a support for supporting the detector such that the detector faces a side surface of the stage, and configured for measuring a position of the stage, and a magnetic shield member provided to the stage and configured to shield an opening of the optical system housing that faces a top surface of the stage from a magnetic field. Here, the magnetic shield member is provided to the stage at a region, in a direction of the axis, other than a region where the detection device is provided.
Public/Granted literature
- US20130011797A1 CHARGED PARTICLE BEAM DRAWING APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2013-01-10
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